A thermoelectric thin-film device consisting of n-type Bi2Te3 and p-type Sb2Te3 thin-film legs was prepared on a glass substrate by using
co-evaporation and annealing process. The Seebeck coefficient and the power factor of the co-evaporated Bi2Te3 film were ¹30μV/K and
0.7 © 10¹4W/K2·m, respectively, and became substantially improved to ¹160μV/K and 16 © 10¹4W/K2·m by annealing at 400°C for 20 min.
While the Seebeck coefficient of the co-evaporated Sb2Te3 thin film was 72μV/K, it increased significantly to 165142μV/
K by annealing at
200400°
C for 20 min. A maximum power factor of 25 © 10¹4W/K2·m was achieved for the co-evaporated Sb2Te3 film by annealing at 400°C
for 20 min. A thermopile sensor consisting of 10 pairs of n-type Bi2Te3 and p-type Sb2Te3 thin-film legs exhibited a sensitivity of 2.7mV/K.