Figure 7 shows an inside view of a prototype gyro sensor
using the resonator. A metal package at the center of the gyro
sensor is the resonator.
A chart of output voltage for stepped input of angular
velocity Ωz is shown in Fig. 8. In this measurement, the noise
level in the static state was 4.84 deg/s(rms.). The result clearly
shows that the double-ended tuning fork quartz resonator
performed as a gyro sensor.
The gyro characteristics of the prototype resonator are
shown in Fig. 9. The sensitivity Sz to the angular velocity
Ωz was 5.54 mV/(deg/s), linearity was 1.67%FS. We also
measured the gyro characteristics of the angular velocities
Ωx,Ωy around the x- and y-axes, and their sensitivities were
Sx=-0.04 mV/(deg/s) and Sy=-1.48 mV/(deg/s). As the values
|Sx/Sz|=0.72% and |Sy/Sz|=26.7% indicate, sensitivity on
the y-axis was remarkably high.