The bandgap of the films changes from 5.35 up to∼3.30 eV. Obtained films are very flat and smooth, root mean
square roughness Rms equals to ∼0.5–1.0 nm. Microhardness of these films changes from 1.9 up to 2.4 GPa, and Young's modulus changes from
12.2 up to 15.9 GPa.