MEMS switches are surface-micromachined devices
which use a mechanical movement to achieve a short
circuit or an open circuit in the RF transmission-line
(Figs. 1-2). RF MEMS switches are the specific micromechanical
switches which are designed to operate at
RF to mm-wave frequencies (0.1 to 100 GHz). The
advantages of MEMS switches over PIN diode or FET
switches are