there is a risk that particles will break loose from
reactor walls, fall down on the surface of the growing film,
and introduce pinholes in it. There might also be a source
of contamination in this reactor type because of the reaction
between the material of the reactor wall and the vapor. In the
hot wall reactor, homogeneous reactions, affecting the
deposition reactions and hence the structure of the films,
may take place in the vapor. There is a successive depletion
with respect to the reactants as they are transported through
the reactor. Such a depletion may yield different deposition
conditions within the reactor. Finally, in a hot wall reactor,
many substrates can be deposited simultaneously.
there is a risk that particles will break loose fromreactor walls, fall down on the surface of the growing film,and introduce pinholes in it. There might also be a sourceof contamination in this reactor type because of the reactionbetween the material of the reactor wall and the vapor. In thehot wall reactor, homogeneous reactions, affecting thedeposition reactions and hence the structure of the films,may take place in the vapor. There is a successive depletionwith respect to the reactants as they are transported throughthe reactor. Such a depletion may yield different depositionconditions within the reactor. Finally, in a hot wall reactor,many substrates can be deposited simultaneously.
การแปล กรุณารอสักครู่..
