have studied the dependence of the plasma inductance on pressure and frequency and reported that for a discharge at frequency below a few tens of MHz and pressure above a few tens of mTorr (1 mTorrE0.133 Pa), these regions are largely resistive,
have studied the dependence of theplasma inductance on pressure and frequency andreported that for a discharge at frequency belowa few tens of MHz and pressure above a few tensof mTorr (1 mTorrE0.133 Pa), these regions arelargely resistive,