This metal-contamination type, especially for the smaller metal
particle size, maybe is not easy to be screened out. Here, we
proposed an enhanced test metrology to conquer this barrier. Using
three designed tests to do the comparison, there were (1) moisture,
temperature, and bias; (2) moisture and temperature; and (3)
temperature and bias, respectively. All these samples were processed
by final test (FT) and FA after each experiment. According to the FT
and FA results, the test condition 1 can effectively screen out the
memory products that were contaminated by metal particle, but the
test condition 2 and 3 could not elaborate this screen function. The
FT results were summarized in Table 4 to 6, and the FA results were
shown in Fig. 3 to 5.