investigated the connecting
transport AMHS in a simplified 300 mm wafer fab. The
simulation results showed that the combination of
vehicles had a significant effect on average travel time,
throughput, and vehicle utilization. When travel time
was the major concern, the suitable method was the
combination of Type-A and Type-D vehicles. When
throughput is the major concern, the suitable method
was the combination of Type-A and Type-C vehicles.
When vehicle utilization was the major concern, the
suitable method is the combination of Type-A and
Type-B vehicles. However, not one method outperformed
the others in all operational scenarios.