Buckyballs, carbon nanotubes, nanowires, quantum
dots, molecular motors, … together with the atomicforce
microscope (AFM) as an experimental tool à
Ø Synthetic and “top-down” nanotechnology earns respect of
MEMS community
• Why is nanotechnology interesting?
Ø Molecular control of sensing interface (chemical detection)
Ø Synthetic processes promise to create new batch-fabrication
technologies
Ø Planar lithography is reaching into the nano regime (state-ofthe
are is 50 nm line/space; spacer lithography has reached
7 nm)
Ø New computational devices: neural, quantum computing