Detection of the hybridization of double stranded DNA was carried out using a single crystalline diamond synthesized by plasma-enhanced chemical vapor deposition (PECVD) by Nebel et al. [30].
To immobilize DNA onto the sensing layer of the constructed ISFET, amine linker-molecules were covalently bound onto hydrogen-treated diamond surfaces by photochemical method. Firstly, 3’-thiol-modified single stranded DNA was attached to the gate sensing layer of the diamond, and then the ssDNA-coated gate was hybridized with the complementary DNA.