also shows the grain size obtained after a post-annealing treatment
in atmosphere. For growth temperatures of 650 °C and below,
the grain size is increased by annealing, although the change is minimal
for films grown at 500–650 °C. The film grown by HiPIMS at 700 °C
already has the largest grain size before annealing and in this film the
grain size decreases during the post-annealing process.