With further improvements in the process technology
regarding flushing cycle times, flushing speed, servo
regulation and adaptive process control, super-finishing
of meso-micro scale surfaces using stochastic orbiting
was demonstrated. With the optimized technology, tool
wear was reduced to a few micrometres for finishing
operations. Since it was not feasible to measure surface
roughness using the tactile method for micro scale
surfaces (1mm2, 0.25mm2 and 0.09mm2), surface
roughness was measured using Alicona Infinitefocus. It
can be seen in table 2 that the meso-scale surfaces with
Ra