X-ray optics can be used to enhance both types of XRF instrumentation. For conventional XRF instrumentation, typical focal spot sizes at the sample surface range in diameter from several hundred micrometers up to several millimeters. Polycapillary focusing optics collect X-rays from the divergent X-ray source and direct them to a small focused beam at the sample surface with diameters as small as tens of micrometers. The resulting increased intensity, delivered to the sample in a small focal spot, allows for enhanced spatial resolution for small feature analysis and enhanced performance for measurement of trace elements for Micro X-ray Fluorescence applications. Doubly curved crystal optics direct an intense micron-sized monochromatic X-ray beam to the sample surface for enhanced elemental analysis.