The intensities of these peaks decreased as the laser power increased and eventually disappeared, suggesting gradual oxidative decomposition of the carbonized products.It should also be noted that while these Raman spectra can be attributed to amorphous phases of ITO, the films prepared at higher laser powers or slower scan speeds exhibited weak band sin the range 200–750 cm−1 assigned to the crystalline phase, a scan be seen in Fig. 9f and g