An increase in resistance value of about one order in magnitude was detected for samples treated by conventional-TA at 400◦C for 30 min at optimal operating temperature of 300◦C and RTA at 525◦C for 60 s at lower optimal operating temperature of 275◦C. It has been observed that the response and recovery times for pure copper oxide-based sensors can be significantly improved by Zn-doping, e.g. from ∼4.1 sand ∼10.5 s to about 3.3 s and 7.2 s, respectively.