From the linear resonance graph shown in Figure 7, we found that the quality factor value was about 65 under the 1 MW load condition. Therefore, the intrinsic mechanical quality value was presumed to be twice as large as the obtained value, that is, a Q value of about 130. Furthermore, the capacitance value between the comb electrodes was measured to be 632 pF, including the parasitic capacitance, and the power efficiency defined by Equation (13) was calculated as where mp is the weight of the proof mass.