Long range sensors are also becoming necessary in standard nanopositioning applications due to the development of dual-stage actuators [77–80] and stepping mechanisms [81,82]. Capacitive sensors can be adapted for this purpose by using a periodic array of electrodes [55]. Such techniques can also be applied to magnetic or inductive sensing principles. Due to the increasing availability of long range nanopositioning mechanisms, an increased focus on the development of cost effective long range sensors is required.