McLeod Gauge is a vacuum gauge that uses the same principle as that of a manometer. By using the pressure dividing technique, its range can be extended from a value of 10-4 Torr. The basic principle is called the multiple compression technique. It is shown in the figures below. If there are two bulbs A and B connected with the McLeod and test gauges through capillary tubings, the pressure on the right hand side of the test gauge is very small and the capillary connection between T and bulb B very long, then the flow law can be written as
Column of mercury. Boyle’s law is then used to relate the two pressures on either side of the mercury to the distance of travel of the mecury within the capillary. Mecury is the preferred working fluid because of its high density and very low vapor pressure.
At the equilibrium and measuring position, the capillary pressure, p , is related to the unknown gas pressure to be determined, p1, by p2 = p1( ) where is the gas volume of the gauge in Figure 9.3 (a) (a constant for a gauge at any pressure) and is the capillary volume in figure 9.3 (b). But = Ay, where A is the known cross-sectional area of the capillary and y is the vertical length of the capillary and y is the vertical length of the capillary occupied by the gas. With as the specific weight of the mercury, the difference in pressures is related by such that the unknown gas pressure is just a function of y:
In practice, a commercial McLeod gauge will have the capillary etched and calibrated to indicate either pressure, p1, or its equivalent head, p1/ , directly.
The McLeod gauge generally does not require correction. The reference stem offsets capillary forces acting in the measuring capillary. Instrument systematic uncertainty will be on the order of 0.5% (95%) at 1 mm Hg abs and increasing to 3% (95%) at 0.1 mm Hg abs.