On the other hand, an AZO target with lower
resistivity can be used to produce a more homogeneous film
having lower resistivity [10,11]. Minami et al. [10] also indicated
that using an AZO target with lower resistivity can decrease the
arcing counts. Furthermore, the direct-current (DC) deposition
rate of an AZO film is higher when the resistivity of an AZO
* Corresponding author. target is lower [10].