The preparation and the properties of NC-ZnO can be at best
described by using asequence of growing nominally 165 nm of
ZnO by LPCVD (B2H6/DEZ¼ = 1.1 103) andthenperforminga
diborane–water treatment.A complete stack of approximately
1.65 mm thickness is composed of 10 deposition steps separated by
9 treatment steps.