Abstract The ferromagnetic transparent conducting film is
a multifunctional film which has high visible transmittance,
low resistivity and room-temperature ferromagnetism, simultaneously.
In this article, ferromagnetic transparent conducting
ZnO:Al/Fe65Co35/ZnO:Al multilayer films were
fabricated by inserting a middle magnetic Fe65Co35 layer
into aluminum-doped zinc oxide (ZnO:Al) matrix using
a magnetron sputtering apparatus at substrate temperature
ranging from room temperature (RT) to 400◦C. The total
film thickness was about 400 nm and the middle Fe65Co35
alloy layer was 4 nm. The influences of substrate temperature
(Ts ) on the structural, electrical, optical and magnetic
properties of the multilayer films were systemically investigated.
The results showed that the microstructure and performance
of the composite multilayer films strongly depended
on the substrate temperature. The present results
also showed that the inserted middle Fe65Co35 alloy thin
layer played an important role in providing the RT ferromagnetism
and decreasing the resistivity of the multilayer
films. Therefore, it is possible to obtain a multifunctional
film material with the combination of good optical
transparency, high electrical conductivity and RT ferromagnetism.