Specific X-ray Fluorescence Measuring Instruments (XRF) for Measurements and Analyses of Coating Thicknesses and Compositions on Wafers
The instruments are particularly suitable for the following applications:
Measurements on structures on wafers in the electronics and semiconductor industries
Analysis of very thin coatings, e.g., gold/palladium coatings of ≤ 0.1 μm (0.004 mils)
Determination of complex multi-coating systems
Automated measurements, e.g., in quality control