Fig. 6. ZnO:B morphology as a function of NC-ZnO filling layer thickness on a 1.8 mm thick base layer measured by AFM. (a) Base layer reference ZnO without filling,B2H6/DEZ ¼ 4.2 Á 10 À 4, (b)–(f) Base layer and NC-ZnO filling with a thickness of 85 nm, 170 nm, 340 nm, 680 nm and 1020 nm,respectively. All AFM scans are 2 Â 2 mm2, the scale bar is 500 nm, and the vertical scale is the same for all scans.