Al-Cu films, obtained from several sputter
deposition processes have been subjected
to accelerated electromigration life tests.
The resultant median times to failure (ranging
from 15-1600 h) have been compared with the
microstructure and alloy distributions in the
films as measured by He backscattering spectroscopy,
transmission electron microscopy and
diffraction and X-ray diffraction. We conclude
that the film texture and location of
copper in the films have a strong influence
on their electromigration resistance.