The new waveguide slit plasma generator is based on
the WR 430 standard rectangular waveguide. Its sketch is
presented in the figure 3. It has the form of the wedge
waveguide tipped with a slit of dimensions 1×54.6 mm.
From microwave power input side the generator is
terminated with a teflon plate which prevent flowing of the
gas to the waveguide circuit. Generated in the waveguide
slit plasma due to the gas flow leaves the waveguide
region.