This calculation is carried out on every point of interest based
on the obtained SEM images to find the heights of the points and
reconstruct the structures in 3D. Attention should be paid to the
following aspects in SEM stereoscopic technique for achieving reliable
results: (i) tilting object at eucentric level; (ii) maintaining the
same working distance and magnification in the both SEM stereo
images; (iii) maximizing the sharpness by taking images at the best
focus; and finally (iv) increasing disparity by best choice of tiling
angle and magnification.