Their concentration has been
calculated from the intensity of the Cr 2p, Fe 2p, Ni 2p, O
1s, C 1s and Si 2p lines. Using the procedure described in a
previous work [7] and the estimation made there concerning
the sputtering rate under analogous experimental conditions
(3 keV, 16mAcm−2, angle of incidence 45_), one may estimate
roughly the thickness of the deposited chromium oxide
layer. From the sputtering time in Fig. 2 (ca. 200 min)
Their concentration has beencalculated from the intensity of the Cr 2p, Fe 2p, Ni 2p, O1s, C 1s and Si 2p lines. Using the procedure described in aprevious work [7] and the estimation made there concerningthe sputtering rate under analogous experimental conditions(3 keV, 16mAcm−2, angle of incidence 45_), one may estimateroughly the thickness of the deposited chromium oxidelayer. From the sputtering time in Fig. 2 (ca. 200 min)
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