The machine has 9 servo motors, 4 pumps, 8 pressure regulators and more than 60 on/off type actuators and numerous sensors. The control system requires power wiring and signal interfacing of each components, signal processing, low-level controllers, a coordinator for various component controllers, a scheduler to dispatch commands in sequences to process wafers following a ‘recipe,’ a user interface, a recipe editor, etc. A systematic structuring tool is required to initiate the design. Axiomatic Design is inherently hierarchical due to the mapping between the different domains and the subsequent decomposition to yield the working level design solutions. AD will be used to design this complex machine control system.