“A Compliance Verification Plan shall be established
to ensure the Organization’s fulfillment of the technical
requirements of the ESD Control Program Plan. Process
monitoring (measurements) shall be conducted in
accordance with a Compliance Verification Plan that
identifies the technical requirements to be verified, the
measurement limits and the frequency at which those
verifications shall occur. The Compliance Verification Plan
shall document the test methods and equipment used
for process monitoring and measurements. If the test
methods used by the Organization differ from any of the
standards referenced in this document, then there must
be a tailoring statement that is documented as part of the
ESD Control Program Plan. Compliance verification records
shall be established and maintained to provide evidence of
conformity to the technical requirements.
The test equipment selected shall be capable of making the
measurements defined in the Compliance Verification Plan.”
(ANSI/ESD S20.20-2007 section 7.3)