The MEMS-based electric field sensor’s theory of
operation is based on the principle of charge induction. The
grounded shielding electrodes manufactured with the MEMS
technologies are used to modulate the electric field at the
surface of sensing electrodes, in order to change the value of
induced electric charge on the sensing electrodes periodically.
An alternating current signal’s peak value varies with the
strength of the electric field around the sensor.And it will be
will be amplified and filtered, at last it will be transformed to
the output voltage, thus we can calcalculate the strength of the
E-field .