DEAs are in the family of electronic electroactive polymers (EAPs). Ron Pelrine and Roy Kornbluh of SRI pioneered the dielectric elastomer actuator (DEA) technology on the macro-scale, taking it from proof of concept to a wide range of devices, from speakers to the legs of walking robots. For further information, see papers by those authors, and more recently, others.
In our group, we are working to miniaturize DEA actuators using conventional microfabrication techniques and materials. The main challenges are making compliant electrodes that are compatible with standard microfabrication methods, finding an elastomer that does not require pre-strain, depositing and patterning the elastomer, developing a successful surface micromachining process sequence, and powering the actuators. Efforts and progress towards these goals are summarized below.
DEAs are in the family of electronic electroactive polymers (EAPs). Ron Pelrine and Roy Kornbluh of SRI pioneered the dielectric elastomer actuator (DEA) technology on the macro-scale, taking it from proof of concept to a wide range of devices, from speakers to the legs of walking robots. For further information, see papers by those authors, and more recently, others.In our group, we are working to miniaturize DEA actuators using conventional microfabrication techniques and materials. The main challenges are making compliant electrodes that are compatible with standard microfabrication methods, finding an elastomer that does not require pre-strain, depositing and patterning the elastomer, developing a successful surface micromachining process sequence, and powering the actuators. Efforts and progress towards these goals are summarized below.
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