Vibration sensors typically use acceleration devices to measure vibration.
Micromachined accelerometers make good vibration sensors for frequencies up
to about 1 kHz. Piezoelectric devices make good vibration sensors with an excellent high-frequency response for frequencies up to 100 kHz. These devices have
very low mass so that the damping effect is minimal. Vibration sensors are
used for the measurement of vibration in bearings of heavy equipment and
pressure lines.