This relation links the activation energy to . With the calculated values of , the TCR of the films can be deduced from equation (3), and the absolute values of TCR are found to increase from 1.2% for to 2.3% as the pO2 increase from 1% to 5.5%, respectively. This is due to the fact that the increase in oxygen during deposition can result in its direct incorporation into the films. Accordingly, an increased oxidation state could be expected to compensate the oxygen deficiency in the films, and the electron concentration in the film decreases, which will cause an increase of the activation. As a result, absolute value of TCR increases [21].