The silicon-based sensor/chip system for biological applications has become a good alternative in
detection technology, which is based on analyzing parameters of cell viability. For example, ISFETs
and planar electrodes were optimized to examine in vitro or in vivo cell functions such as cellular
metabolism [94,100–102], attachment and spreading of epithelial MDCK cells using electric cell-substrate
impedance sensing (ECIS) [103], and cell response to different toxic materials [104–107]. Recently,
on-line and continuous system based on ECIS for the monitoring of cell growth and cytotoxic effects
of metal compounds on fibroblastic V79 cells has been developed by Xiao and Luong [105]