The phase and crystallinity of nanoparticles were analyzed by XRD (Bruker D8 Discoverwith Cu α radiation at 40 kV and 40 mA), at 2θ between 10 and 40° (2θ resolution of 0.03° and integration time of 384 s). The Topas 3 software was used for analyzing of the data and estimation of crystalline size. Rietveld refinement included in the software was used for the full spectrum fitting to determine the phase composition. The crystalline phases were detected based on the reference data from International Center Diffraction Data (ICDD).