The surface properties of IC encapsulation molds such as anti-sticking, wear and corrosion resistances can be improved by hard surface
coating. The unbalanced magnetron sputtering method is used to deposit Cr, Cr2N, and CrN phase individual. Of the three coatings, the Cr2N
coating has the lowest surface energy and the highest contact angle of water, which reaches as high as 120-. High water-repellency of Cr2N
coating is due to the CH groups on the film surface, and the N –H or O –H bonds are found to be the effective adsorption sites for carbon
substances. The experimental results also show the correlation of coating’s surface energy and its adhesion force with EMC. Performance
evaluation showed that the Cr2N coating could increase the number of molding injections in the IC package production lines by 50%.
D 2005 Elsevier B.V. All rights reserved.
The surface properties of IC encapsulation molds such as anti-sticking, wear and corrosion resistances can be improved by hard surfacecoating. The unbalanced magnetron sputtering method is used to deposit Cr, Cr2N, and CrN phase individual. Of the three coatings, the Cr2Ncoating has the lowest surface energy and the highest contact angle of water, which reaches as high as 120-. High water-repellency of Cr2Ncoating is due to the CH groups on the film surface, and the N –H or O –H bonds are found to be the effective adsorption sites for carbonsubstances. The experimental results also show the correlation of coating’s surface energy and its adhesion force with EMC. Performanceevaluation showed that the Cr2N coating could increase the number of molding injections in the IC package production lines by 50%.D 2005 Elsevier B.V. All rights reserved.
การแปล กรุณารอสักครู่..
