Li-ion batteries are currently considered as energy storage
solution for a wide range of applications, from electrical vehicles
to microsystems. To reach improvements in terms of capacity,
power, and lifetime, there is a trend toward nanostructuring of
the electrode materials while there are also several other efforts to
vigorously change the battery configuration.4 The latter includes, for
example, all-solid-state Li-ion batteries built from thin films, where
3D structuring is also proposed. ALD is considered an enabling
technology for several concepts of nanostructured Li-ion batteries