In order to fabricate titania nanotubes on Ti thin film substrate, Ti thin films were first deposited by DC magnetron sputtering and then anodized the ethylene glycol (C2H6O2) electrolyte consisting of 0.3 wt% ammonium fluoride (NH4F) and 2 vol% water (H2O) with applied voltage of 60V and temperature at 25 ๐C. The effect of anodizing time from 10, 20, 30, 40 and 50 minutes. The morphology and structure of the nanotubes were identified by means of field emission scanning electron microscopy(FE-SEM). The effects of anodization time on nanotube morphology were comprehensively investigated. The results show that the dense and crystalline Ti film can be obtained on the unheated Ti thin film under the sputtering power of 250 W, and the anodization current and voltage play significant roles in the formation of titania nanotube with different tube sizes.