A discrete-event simulation model was developed for
Bays 27/28 in order to predict the operational performance of the intrabay material handing system. The
Bays 27/28 is the one of the set comprising the
photo process. The layout is illustrated in Fig. 7. AGV
are used in this study. The process-flow data is used to
describe the movement rate of lots between tools. The
source of data set is collected from a wafer fab in
Taiwan (see Table 6), which shows the moves per hour
in the process flow from mixed products. -