Poly-methyl-methacrylate thin films were deposited by plasma polymerization under different radio-frequency
discharge powers, monomer partial pressures, and deposition times. Surface profiler was used to evaluate the
thickness and deposition rates of deposited films; Fourier transform infrared spectroscopy for the microstructures;
X-ray photoelectron spectroscopy for the surface chemical compositions and atomic force microscope for the
surface morphology. In addition to the as-deposited PMMA films, some selected films were further treated by
oxygen to modify their surfaces. After thorough material characterizations, the films were used as substrates to
culture human hepatocytes for testing their biocompatibility. Results of the cell culture were assessed by trypsin
cell count, ELISA and MTT assay. It is found that the human hepatocytes can proliferate and perform urea synthesis
well on the deposited poly-methyl-methacrylate thin films with or without oxygen treatment.