We have reported the resonance wavelength shift of 36.5 nm/RIU (RIU means refractive index unit) for the Si ring resonator biosensor. On the other hand Claes et al. fabricated the Si slot ring biosensor, where the slot is formed in the center of the width along the waveguide, and reported the wavelength shift of 298 nm/RIU. One of the problem of Si resonance biosensor is the relatively big temperature dependence of the resonance wavelength. In this paper we use silicon nitride (SiN) as the core material of the ring resonators because of its small temperature coefficient