Although the microwave plasma
torch provides high-density and high-temperature plasmas in
inexpensive ways [2], the plasma volume and temperature of
the microwave plasma torch decrease drastically outside the
discharge tube [3], thereby limiting its capability of bulk treatment of waste. For example, the gas flow rates in the treatment
experiments of CF4 and phosgene were only tens of liters
per minute (L/min), although high destruction and removal
efficiency of more than 96% had been accomplished [2].