Safety and Emergency
All INRF safety and procedural regulations must be followed. Review the INRF standard
operating procedures for fire, chemical spill, acid exposure and HF exposure.
Acetone and methanol are flammable liquids. Handle with care. Do not let the solvent
exceed 55 deg. C. Do not store the solvents near the hotplate or any other source of heat.
Hydrogen peroxide is an explosive chemical. Keep it away from all solvents. Never
leave the RCA process unattended.
Hydrofluorifc acid (HF) is an extremely toxic and dangerous acid. Use of
HF required at least one other person in the clean room. HF should be handled in a
laminar flow bench, using two pairs of nitrile gloves (or neoprene) and eye protection.
Any small spills should be wiped up immediately with wipes and rinsed. Dispose of the
wipe in the corrosive waste container. DO NOT LEAVE the etchant unattended.
A special INRF standard operating procedure for HF has been prepared. Follow the
INRF SOP for HF exposure (summarized below).
In case of exposure Seek medical attention immediately! For skin exposure, flush
immediately with water for 5 minutes, followed by liberal application of calcium
gluconate gel to the skin. Remove all clothing that are exposed before and while flushing
with water. For eye exposure, flush the eye with three times, 5 minutes each. Irrigate the
eye repeatedly with 500-1000 ml of a 1% calcium gluconate solution applied through a
syringe. Call for prompt emergency room transport. Apply ice-water compresses during
transport.