The designed automatic measuring system can be used to determine several material parameters: the Hall voltage (VH), carrier concentration (n), Hall coefficient (RH) and the conductivity type (n or p) are all derived from the Hall voltage measurement. To be able to evaluate carrier mobility (µ) it is necessary to measure also the resistivity of the sample (ρ). Due to the required contact node arrangement shown in Fig. 1, the van der Pauw method is the most frequently used method in the Hall measurement systems to evaluate the sample resistivity.