In this work,we characterize the photocatalytic and anti-bacterial activity of TiO2 films deposited by ALD at different temperatures.In particular,the variation of the growth temperature influences film properties.Here we demonstrate that increasing
growth temperature up to 300 °C clearly improves TiO2 film
photocatalytic activity.However,the process does not show to
have an impact on antibacterial activity.Different routes have to
be followed in order to obtain enhanced antibacterial properties.