Er doped aluminum nitride (AlN:Er) thin films were deposited on 2 cm 2 cm Si (111) substrates and optical fibers using RF sputtering in pure nitrogen. Typical parameters are 120W RF power with a 50 mm diameter pure aluminum target,
Er doped aluminum nitride (AlN:Er) thin films were depositedon 2 cm 2 cm Si (111) substrates and optical fibers using RFsputtering in pure nitrogen. Typical parameters are 120W RFpower with a 50 mm diameter pure aluminum target,