SiCl4 is a by-product produced from the polysilicon production process, and it is also the precursor for tetraalkoxysilanes preparation. Since the rapid development of polysilicon production in China, SiCl4 has caused sever environmental problems mainly due to the difficulty to treat SiCl4[9–10]. The problematic SiCl4 may be actually another cheaper pure precursor for preparing spherical SiO2.