Abstract
Evaluation of a micro electret generator for energy harvesting applications is presented. MEMS-friendly perfluoropolymer,
CYTOP is adopted as high-performance electret material. In power generation experiments using a prototype seismic generator,
maximum power output of 0.278 mW has been obtained with 1.2 mmp-p in-plane oscillation at 20 Hz. Electrostatic force is
calculated using one-dimensional electrostatic field model. It is found that the electrostatic force in the in-plane direction is
almost constant irrespective to the direction of motion. When two separate generators with a 180˚ phase difference are integrated
on a single chip, the horizontal force becomes smaller by two orders of magnitude, but exhibits different trends from
velocity-damped or coulomb-damped resonant generators.