An Si–O2 bonding structure was observed in all of the filter samples.However,the peak intensity became stronger with
increasing sintering temperature ranging from 1500 C to 1550 C. The oxidation of SiC to SiO2 leads to decrease of
mechanical strength. In particular,the peak intensity of the Si–O2 bond was extremely high in the filter sintered at
1550 C, and this oxidation led to a drastic decrease in mechanical strength.This tendency was also observed in our
result shown in Fig. 5. Therefore,the appropriate sintering temperature of 1450 C is very important to obtain an excellent ceramic filter with high mechanical strength.In addition,chemical properties such as crystallinity and oxidation state,as well as physical properties should be considered in fabrication of a SiC ceramic filter.