In this paper, Zinc Tin Oxide (ZTO) thin films have been deposited both from a ceramic ZnO–SnO2 target,
and from Zn and Sn metal targets. In the case of the metal layers different thermal treatments were performed
to oxidize the deposited Zn and Sn layers and thus to form the desired mixed oxide. In view of
future industrial applications, some comparative studies between the approached depositions have been
performed. In particular, the influence of thickness and temperature on the structural, morphological and
optical properties of the ZTO thin films were investigated by SEM and AFM analyses, revealing smooth
and homogeneous surfaces. The optical properties of the as-obtained ZTO thin films in the UV–vis range
were investigated as well. Although the best value in terms of transmittance was obtained in the case of
oxidized metal films (i.e. 96% vs. 93% for layers grown from a ceramic target), structural and morphological
investigations indicated the deposition from ceramic target as the optimal choice to obtain high quality
ZTO thin films. Thereby, the results presented in this work confirm both the potential of ZTO as TCO
material and the matching of ZTO thin films with the requirements for high quality optical and electronic
applications.